Silicon Semiconductor Webinar

Silicon semiconductor fabs use large amounts of hydrogen for wafer annealing and other existing applications. A reliable supply of ultra-pure hydrogen is critical for successful device fabrication. The supply of hydrogen to fabs has evolved over time, from delivered gaseous to on-site generation and liquid delivery. This evolution continues with the introduction of ultrapure hydrogen generation using modern PEM water electrolysis. With the construction of new and expanded fabs, and the introduction of EUV lithography dramatically ramping up semiconductor hydrogen requirements, the time for on-site ultra-pure hydrogen to serve silicon fabs has arrived.