This article reviews hydrogen supply basics for the semiconductor sector, and introduces an on-site method of hydrogen carrier gas supply for producing semiconductor devices that are being used at more than 50 semiconductor facilities across the globe.
On-site hydrogen can provide:
• Adequate pressure for all reactor inlet purification techniques
• Ultra-pure gas for best process results
• True zero-inventory design – hydrogen is generated as it is employed by the process
• Much lower pressure compared to stored hydrogen techniques, removing self-ignition hazard
• The ability to save money by reducing inlet gas purification cost
• Eliminates risk of introducing oxygen into piping during storage system change-out
